ANALYSIS CONDITIONS. Primary Beam. Primary Beam Energy. Angle of Incidence. Sputtering Rate. Detected Area. Species Monitored. End Point. Energy Distribution. PROFILE ISSUES. Ion Beam Mixing and Depth Resolution. Segregation and Charge Driven Diffusion. Matrix Effects. Surface Effects. Particulates. Crate Shape. Microtopography. Memory Effect. Count Rate Saturation. Sample Location and Mounting. Mass Interferences. QUANTIFICATION. Procedure. Calibration Using Ion Implantation. Systematic Trends in RSFs. SPECIFIC APPLICATIONS. Bulk Analysis. Metals and Rough Surfaces. Insulators. Interfaces. Multilayers. Residual Gas Elements. Small Areas. Major Elements. Appendices. Index.
About the authors Robert G. Wilson is a scientist at Hughes Research Laboratories, Malibu, California, whose staff he joined in 1963. Previously, he worked for Rockwell/Rocketdyne and Battelle Memorial Institute. He is the author of Ion Beams with Applications (Wiley, 1973) and lon Mass Spectra (Wiley, 1974). Dr. Wilson received a PhD in physics from Ohio State University in 1961. Fred A. Stevie is a member of the technical staff at AT&T Bell Laboratories, Allentown, Pennsylvania, where he has worked since 1973. He is a member of the American Vacuum Society, the American Society for Mass Spectrometry, and the Microbeam Analysis Society. Mr. Stevie received an MS in physics from Vanderbilt University in 1970. Charles W. Magee is a cofounder of Evans East, Inc. in Plainsboro, New Jersey, a commercial materials laboratory specializing in surface, thin--film, and trace element analysis. For fourteen years he was a member of the technical staff at the David Sarnoff Research Center (formerly RCA Laboratories). Dr. Magee holds two U.S. patents, he has written over 100 publications, and he has presented more than 50 invited lectures. Dr. Magee is an associate editor of the Journal of Vacuum Science and Technology (B), and he is the recipient of the Peter Mark Memorial Award of the American Vacuum Society (1982), and of the Young Author Award of the Solid State Science and Technology Division of the Electrochemical Society (1979). He has twice won RCA Laboratories' Outstanding Achievement Awards for his work in secondary ion mass spectrometry (in 1982, as an individual effort, and, in 1976, for a team effort with William L. Harrington). Dr. Magee received a PhD in analytical chemistry from the University of Virginia in 1973.
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